Reactive Ion Etch Lab

This lab guide, created by the Nanotechnology Applications and Career Knowledge Network at Pennsylvania State University, features a laboratory activity where students work with the "dry etch process and determine the resultant etch rates of multiple materials by analyzing data obtained throughout the experiment." The lab guide includes objectives, an introduction to dry etching, step-by-step directions to the lab activity itself, including links to video demonstrations, and post-lab questions to test student comprehension.