Introduction to Low Pressure Chemical Vapor Deposition

This 5-page activity guide, created by the Nanotechnology Applications and Career Knowledge Network (NACK) Center, is for an activity where students "review the fundamental principles and the operation of a low pressure chemical vapor deposition (LPCVD) system." The guide includes an introduction to chemical vapor deposition (CVD), overviews of LPCVD components, a video demonstrating LPCVD operation, and questions to test student comprehension.