EquiPSim

EquiPSim is a simulation-based learning environment that was created by the Human-Computer Interaction Lab at the University of Maryland. EqiuPSim was designed to train technicians, engineers, and operators in semiconductor manufacturing jobs and in educational settings. This software was developed using the SimPLE framework (Simulated Processes in a Learning Environment).

Several modules are included that "... emphasize the dynamic behavior of chemical and physical processes as realized in the complex equipment utilized in semiconductor fabs." Vacuum, Gas Flow, Heat Transfer, and Chemical reaction are the included modules. EquiPSim is available free for download. Publications, presentations, participants, and users of the software are listed.