E SC 214: Patterning for Nanotechnology

Collection description:
This collection, from the Nanotechnology Applications and Career Knowledge Support (NACK) Center at Pennsylvania State University), includes materials from the undergraduate laboratory course titled Patterning for Nanotechnology. The following five units are included in the course:

1. Advanced Lithography General Information
2. Advanced Lithography Tool Technologies
3. Advanced Lithography and Resists
4. Novel Lithography Techniques
5. Novel Lithography Techniques: Block Copolymer Patterning

Course Contents:
Each unit includes a number of lectures and associated laboratory activities that can be viewed separately or downloaded in .ppt and .pdf formats. Lectures provide in-depth coverage of each topic, including illustrations, examples, and comprehensive information. Lectures are also included in .mp4 format. Each lab includes a variety of information, such as an objective, background information, a detailed procedure, charts and tables, and follow-up questions. Also included is a lab overview that provides a brief description of each lab. Course lectures are available to view separately.

The following labs are included:

• Pattern Transfer: Photolithography Practice
• Microcontact Printing
• Electron Beam Lithography
• Multiple Level Pattern Transfer: Photolithography

For orientation purposes E SC 214 Unit 1 Lecture 1 is included as a separate attachment and offers a sample of the type of material included in this course.

Below is a list of the files included in the .zip attachment. The size of each file is included in parenthesis.

E SC 214 Patterning for Nanotechnology.zip (16 files, 39.2 MB)

• Unit 1 - Advanced Lithography General Information (3 files, 5.15 MB)
• Unit 2 - Advanced Lithography Tool Technologies (3 files, 8.04 MB)
• Unit 3 - Advanced Lithography and Resists (3 files, 5.11 MB)
• Unit 4 - Novel Lithography Techniques (3 files, 7 MB)
• Unit 5 - Novel Lithography Techniques - Block Copolymer Patterning (3 files, 14.2 MB)

E SC 214 Patterning for Nanotechnology Laboratory Activities.zip (5 files, 2.45 MB)

• Overview of Laboratory Activities (214 Lab Overview 06 24 10.doc 44 KB)
• Pattern Transfer: Photolithography Practice (214_Lab_2 Pattern Transfer Photolithography Practice 06 24 10.doc 76 KB)
• Microcontact Printing (214_Lab_7 E-Beam lithography 06 24 10.doc 287 KB)
• 214 Lab 5 & 6
  • Flowchart for Lithography Alignment Lab (214_Lab_5,6 Flow Chart Multiple Level Pattern Transfer 06 24 10.doc 29 KB)
  • Multiple Level Pattern Transfer: Photolithography (214_Lab_5,6 Multiple Level Pattern Transfer 06 24 10.doc 61 KB)