Introduction to Top-Down Lithography Contact and Proximity Lithography

This 4-page lab activity, from the Nanotechnology Applications and Career Knowledge Resource Center (NACK Center), provides an overview and demonstration of the procedures necessary to perform contact lithography. Sections of the lab include Objective, Background, Experiment, and Questions. The background section includes information on lithography as a process of nanofabrication, explaining its role in pattern definition, the function of photoresist, the use of ultraviolet light in photolithography, and the capabilities of contact aligners like the Karl Suss MJB3 and MA6.