Multiple Level Pattern Transfer: Photolithography

This 3-lab guide and flow chart, created by the Nanotechnology Applications and Career Knowledge Support (NACK) Center at Pennsylvania State University, are for a lab where students "learn how to perform feature alignment on a manual contact aligner." In the lab, students will learn the difference between hydrophilic and hydrophobic materials, uncover specific patterns in etch processes, and complete lithography patterning on multiple etched samples. The lab guide includes background information necessary for the completion of the lab, pre-requisites, lab instructions, and post-lab student questions. The flow chart provides steps for the flow chart for a lithography alignment lab.