Electron Beam Lithography

This 2-page lab guide, created by the Nanotechnology Applications and Career Knowledge Support (NACK) Center at Pennsylvania State University, is for a laboratory activity that teaches students electron beam (e-beam) lithography. Upon completing the activity, "students will learn about the basics of e-beam lithography, differences and advantages of this technique over conventional photolithography techniques" and how to use "FESEM [field emission scanning electron microscopy] to image patterns on a substrate which were defined using e-beam lithography." The lab guide includes background information, prerequisite training, lab instructions, and post-lab student questions.