Furnace Oxidation

This lab activity, provided by the Nanotechnology Applications and Career Knowledge Network (NACK) Center, teaches students about "oxidation and the furnace used to grow oxides." In the lab, students will "attempt to visually determine the oxide thickness of oxidized samples from a previous group," by "cross-referencing a color oxidation chart" provided by the instructor. Upon completion of the exercise, students should be able to answer questions such as: "What is a gate oxide?" and "Why is cool down a necessary step in oxidation?" The 5-page lab guide includes background information on the lab, instructions, student questions, and a table for students to input experiment results.