Ion Implantation Simulation

This 4-page lab guide, created by the Nanotechnology Applications and Career Knowledge Support (NACK) Center at Pennsylvania State University, is for a laboratory activity where students use an ion implanation simulation software to demonstrate the effects of ion implantation. Throughout the lab, students will learn "how the electrical properties of wafer are changed, how damage is caused to the crystal lattice, and how the amount of energy applied to the ions affects the impanation ." The lab guide includes background information, prerequisite training, instructions, and student questions.