Atomic Layer Deposition Lab

This resource, provided by the Nanotechnology Applications and Career Knowledge Support Center (NACK Center), includes a lab guide and corresponding videos that walk through the evaluation of the atomic layer deposition (ALD) process. In the lab, students use the ALD process to deposit a transparent conducting oxide (TCO), utilizing the principles of resistance and resistivity. The 6-page lab guide provides instructions for the four steps of the lab and includes background information on the ALD process and the deposition of Zinc Oxide (ZnO).

Included are brief demonstration videos that accompany the first three steps of the lab. The videos cover sample pretreatment for substrate preparation, the ALD process, and the use of a UV-Visible Spectrophotometer to characterize the transmittance data of the Al doped ZnO sample.