Plasma Removal Process (Part 2 of 2)

This video, provided by the Nanotechnology Applications and Career Knowledge Support (NACK) Center at Pennsylvania State University, is part two of a two-part lecture on plasma and nanotechnology materials. In this section, Terrence Kuzma from Pennsylvania State University focuses on the plasma removal process and analyzes various recipe parameters and their resultant etch profiles. Also discussed are specific chemistries for popular nanotechnology materials, plasma etching, and endpoint plasma characterization technology.

The video runs 42:35 minutes in length. Also included are the presentation slides and an audio version of the webinar. Part one of the lecture is available to view separately.